4/20/2012	7:28:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2012	7:28:07 AM	Recipe started at 7:28 AM
4/20/2012	7:28:07 AM	Helium valve closed
4/20/2012	7:28:07 AM	H2 valve closed
4/20/2012	7:28:07 AM	BCl3 valve closed
4/20/2012	7:28:07 AM	PH3 valve closed
4/20/2012	7:28:07 AM	SiCl4 pre valve closed
4/20/2012	7:28:07 AM	SiCl4 post valve closed
4/20/2012	7:28:07 AM	Main Vac valve closed
4/20/2012	7:28:07 AM	Bypass valve closed
4/20/2012	7:28:07 AM	Bubbler valve closed
4/20/2012	7:28:07 AM	Helium MFC set to  0.000000
4/20/2012	7:28:07 AM	H2 MFC set to  0.000000
4/20/2012	7:28:07 AM	BCl3 MFC set to  0.000000
4/20/2012	7:28:07 AM	PH3 MFC set to  0.000000
4/20/2012	7:28:07 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:28:07 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	7:28:07 AM	Tube furnace set to 0
4/20/2012	7:28:10 AM	H2 valve closed
4/20/2012	7:28:10 AM	BCl3 valve closed
4/20/2012	7:28:10 AM	PH3 valve closed
4/20/2012	7:28:10 AM	SiCl4 pre valve closed
4/20/2012	7:28:10 AM	SiCl4 post valve closed
4/20/2012	7:28:10 AM	Main Vac valve closed
4/20/2012	7:28:10 AM	Bypass valve closed
4/20/2012	7:28:10 AM	Bubbler valve closed
4/20/2012	7:28:10 AM	Helium valve opened
4/20/2012	7:28:10 AM	Helium MFC set to  500.000000
4/20/2012	7:28:10 AM	H2 MFC set to  0.000000
4/20/2012	7:28:10 AM	BCl3 MFC set to  0.000000
4/20/2012	7:28:10 AM	PH3 MFC set to  0.000000
4/20/2012	7:28:10 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:28:10 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	7:28:10 AM	Tube furnace set to 0
4/20/2012	7:29:15 AM	Helium valve closed
4/20/2012	7:29:15 AM	H2 valve closed
4/20/2012	7:29:15 AM	BCl3 valve closed
4/20/2012	7:29:15 AM	PH3 valve closed
4/20/2012	7:29:15 AM	SiCl4 pre valve closed
4/20/2012	7:29:15 AM	SiCl4 post valve closed
4/20/2012	7:29:15 AM	Main Vac valve closed
4/20/2012	7:29:15 AM	Bypass valve closed
4/20/2012	7:29:15 AM	Bubbler valve closed
4/20/2012	7:29:15 AM	Helium MFC set to  0.000000
4/20/2012	7:29:15 AM	H2 MFC set to  0.000000
4/20/2012	7:29:15 AM	BCl3 MFC set to  0.000000
4/20/2012	7:29:15 AM	PH3 MFC set to  0.000000
4/20/2012	7:29:15 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:29:15 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	7:29:15 AM	Tube furnace set to 0
4/20/2012	7:29:16 AM	Run finished at 7:29 AM
4/20/2012	7:29:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2012	7:30:39 AM	Helium MFC set to  500.000000
4/20/2012	7:30:41 AM	Helium valve opened
4/20/2012	7:34:57 AM	Helium valve closed
4/20/2012	7:34:57 AM	H2 valve closed
4/20/2012	7:34:57 AM	BCl3 valve closed
4/20/2012	7:34:57 AM	PH3 valve closed
4/20/2012	7:34:57 AM	SiCl4 pre valve closed
4/20/2012	7:34:57 AM	SiCl4 post valve closed
4/20/2012	7:34:57 AM	Main Vac valve closed
4/20/2012	7:34:57 AM	Bubbler valve closed
4/20/2012	7:34:57 AM	Bypass valve closed
4/20/2012	7:34:57 AM	Helium MFC set to  0.000000
4/20/2012	7:34:57 AM	H2 MFC set to  0.000000
4/20/2012	7:34:57 AM	BCl3 MFC set to  0.000000
4/20/2012	7:34:57 AM	PH3 MFC set to  0.000000
4/20/2012	7:34:57 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:34:57 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:34:58 AM	Tube furnace set to 0
4/20/2012	7:34:58 AM	Baratron reads 900.567492 Torr.  Emergency exit.
4/20/2012	7:36:17 AM	Program exited cleanly
4/20/2012	7:36:22 AM	Helium valve closed
4/20/2012	7:36:22 AM	H2 valve closed
4/20/2012	7:36:22 AM	BCl3 valve closed
4/20/2012	7:36:22 AM	PH3 valve closed
4/20/2012	7:36:22 AM	SiCl4 pre valve closed
4/20/2012	7:36:22 AM	SiCl4 post valve closed
4/20/2012	7:36:22 AM	Main Vac valve closed
4/20/2012	7:36:22 AM	Bypass valve closed
4/20/2012	7:36:22 AM	Bubbler valve closed
4/20/2012	7:36:22 AM	Helium MFC set to  0.000000
4/20/2012	7:36:22 AM	H2 MFC set to  0.000000
4/20/2012	7:36:22 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:22 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:22 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:22 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:23 AM	Tube furnace set to 0
4/20/2012	7:36:23 AM	Helium valve closed
4/20/2012	7:36:23 AM	H2 valve closed
4/20/2012	7:36:23 AM	BCl3 valve closed
4/20/2012	7:36:23 AM	PH3 valve closed
4/20/2012	7:36:23 AM	SiCl4 pre valve closed
4/20/2012	7:36:23 AM	SiCl4 post valve closed
4/20/2012	7:36:23 AM	Main Vac valve closed
4/20/2012	7:36:23 AM	Bubbler valve closed
4/20/2012	7:36:23 AM	Bypass valve closed
4/20/2012	7:36:23 AM	Helium MFC set to  0.000000
4/20/2012	7:36:23 AM	H2 MFC set to  0.000000
4/20/2012	7:36:23 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:23 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:23 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:23 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:23 AM	Tube furnace set to 0
4/20/2012	7:36:23 AM	Baratron reads 900.567492 Torr.  Emergency exit.
4/20/2012	7:36:24 AM	Program exited cleanly
4/20/2012	7:36:36 AM	Helium valve closed
4/20/2012	7:36:36 AM	H2 valve closed
4/20/2012	7:36:36 AM	BCl3 valve closed
4/20/2012	7:36:36 AM	PH3 valve closed
4/20/2012	7:36:36 AM	SiCl4 pre valve closed
4/20/2012	7:36:36 AM	SiCl4 post valve closed
4/20/2012	7:36:36 AM	Main Vac valve closed
4/20/2012	7:36:36 AM	Bypass valve closed
4/20/2012	7:36:36 AM	Bubbler valve closed
4/20/2012	7:36:36 AM	Helium MFC set to  0.000000
4/20/2012	7:36:36 AM	H2 MFC set to  0.000000
4/20/2012	7:36:36 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:36 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:36 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:36 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:37 AM	Tube furnace set to 0
4/20/2012	7:36:37 AM	Helium valve closed
4/20/2012	7:36:37 AM	H2 valve closed
4/20/2012	7:36:37 AM	BCl3 valve closed
4/20/2012	7:36:37 AM	PH3 valve closed
4/20/2012	7:36:37 AM	SiCl4 pre valve closed
4/20/2012	7:36:37 AM	SiCl4 post valve closed
4/20/2012	7:36:37 AM	Main Vac valve closed
4/20/2012	7:36:37 AM	Bubbler valve closed
4/20/2012	7:36:37 AM	Bypass valve closed
4/20/2012	7:36:37 AM	Helium MFC set to  0.000000
4/20/2012	7:36:37 AM	H2 MFC set to  0.000000
4/20/2012	7:36:37 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:37 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:37 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:37 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:37 AM	Tube furnace set to 0
4/20/2012	7:36:37 AM	Baratron reads 900.567492 Torr.  Emergency exit.
4/20/2012	7:36:39 AM	Program exited cleanly
4/20/2012	7:36:47 AM	Helium valve closed
4/20/2012	7:36:47 AM	H2 valve closed
4/20/2012	7:36:47 AM	BCl3 valve closed
4/20/2012	7:36:47 AM	PH3 valve closed
4/20/2012	7:36:47 AM	SiCl4 pre valve closed
4/20/2012	7:36:47 AM	SiCl4 post valve closed
4/20/2012	7:36:47 AM	Main Vac valve closed
4/20/2012	7:36:47 AM	Bypass valve closed
4/20/2012	7:36:47 AM	Bubbler valve closed
4/20/2012	7:36:47 AM	Helium MFC set to  0.000000
4/20/2012	7:36:47 AM	H2 MFC set to  0.000000
4/20/2012	7:36:47 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:47 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:47 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:47 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:47 AM	Tube furnace set to 0
4/20/2012	7:36:47 AM	Helium valve closed
4/20/2012	7:36:48 AM	H2 valve closed
4/20/2012	7:36:48 AM	BCl3 valve closed
4/20/2012	7:36:48 AM	PH3 valve closed
4/20/2012	7:36:48 AM	SiCl4 pre valve closed
4/20/2012	7:36:48 AM	SiCl4 post valve closed
4/20/2012	7:36:48 AM	Main Vac valve closed
4/20/2012	7:36:48 AM	Bubbler valve closed
4/20/2012	7:36:48 AM	Bypass valve closed
4/20/2012	7:36:48 AM	Helium MFC set to  0.000000
4/20/2012	7:36:48 AM	H2 MFC set to  0.000000
4/20/2012	7:36:48 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:48 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:48 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:48 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:48 AM	Tube furnace set to 0
4/20/2012	7:36:48 AM	Baratron reads 900.567492 Torr.  Emergency exit.
4/20/2012	7:36:49 AM	Program exited cleanly
4/20/2012	7:36:55 AM	Helium valve closed
4/20/2012	7:36:55 AM	H2 valve closed
4/20/2012	7:36:55 AM	BCl3 valve closed
4/20/2012	7:36:55 AM	PH3 valve closed
4/20/2012	7:36:55 AM	SiCl4 pre valve closed
4/20/2012	7:36:55 AM	SiCl4 post valve closed
4/20/2012	7:36:55 AM	Main Vac valve closed
4/20/2012	7:36:55 AM	Bypass valve closed
4/20/2012	7:36:55 AM	Bubbler valve closed
4/20/2012	7:36:55 AM	Helium MFC set to  0.000000
4/20/2012	7:36:55 AM	H2 MFC set to  0.000000
4/20/2012	7:36:55 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:55 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:55 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:55 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:55 AM	Tube furnace set to 0
4/20/2012	7:36:56 AM	Helium valve closed
4/20/2012	7:36:56 AM	H2 valve closed
4/20/2012	7:36:56 AM	BCl3 valve closed
4/20/2012	7:36:56 AM	PH3 valve closed
4/20/2012	7:36:56 AM	SiCl4 pre valve closed
4/20/2012	7:36:56 AM	SiCl4 post valve closed
4/20/2012	7:36:56 AM	Main Vac valve closed
4/20/2012	7:36:56 AM	Bubbler valve closed
4/20/2012	7:36:56 AM	Bypass valve closed
4/20/2012	7:36:56 AM	Helium MFC set to  0.000000
4/20/2012	7:36:56 AM	H2 MFC set to  0.000000
4/20/2012	7:36:56 AM	BCl3 MFC set to  0.000000
4/20/2012	7:36:56 AM	PH3 MFC set to  0.000000
4/20/2012	7:36:56 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:36:56 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:36:56 AM	Tube furnace set to 0
4/20/2012	7:36:56 AM	Baratron reads 900.567492 Torr.  Emergency exit.
4/20/2012	7:36:57 AM	Program exited cleanly
4/20/2012	7:37:37 AM	Helium valve closed
4/20/2012	7:37:37 AM	H2 valve closed
4/20/2012	7:37:37 AM	BCl3 valve closed
4/20/2012	7:37:37 AM	PH3 valve closed
4/20/2012	7:37:37 AM	SiCl4 pre valve closed
4/20/2012	7:37:37 AM	SiCl4 post valve closed
4/20/2012	7:37:37 AM	Main Vac valve closed
4/20/2012	7:37:37 AM	Bypass valve closed
4/20/2012	7:37:37 AM	Bubbler valve closed
4/20/2012	7:37:37 AM	Helium MFC set to  0.000000
4/20/2012	7:37:37 AM	H2 MFC set to  0.000000
4/20/2012	7:37:37 AM	BCl3 MFC set to  0.000000
4/20/2012	7:37:37 AM	PH3 MFC set to  0.000000
4/20/2012	7:37:37 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:37:37 AM	Bypass solenoid MFC set to  760.000000
4/20/2012	7:37:37 AM	Tube furnace set to 0
4/20/2012	7:37:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2012	7:37:40 AM	Recipe started at 7:37 AM
4/20/2012	7:37:40 AM	Helium valve closed
4/20/2012	7:37:40 AM	H2 valve closed
4/20/2012	7:37:40 AM	BCl3 valve closed
4/20/2012	7:37:40 AM	PH3 valve closed
4/20/2012	7:37:40 AM	SiCl4 pre valve closed
4/20/2012	7:37:40 AM	SiCl4 post valve closed
4/20/2012	7:37:40 AM	Main Vac valve closed
4/20/2012	7:37:40 AM	Bubbler valve closed
4/20/2012	7:37:40 AM	Bypass valve opened
4/20/2012	7:37:40 AM	Helium MFC set to  0.000000
4/20/2012	7:37:40 AM	H2 MFC set to  0.000000
4/20/2012	7:37:40 AM	BCl3 MFC set to  0.000000
4/20/2012	7:37:40 AM	PH3 MFC set to  0.000000
4/20/2012	7:37:40 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:37:40 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	7:37:40 AM	Tube furnace set to 0
4/20/2012	7:38:41 AM	Helium valve closed
4/20/2012	7:38:41 AM	H2 valve closed
4/20/2012	7:38:41 AM	BCl3 valve closed
4/20/2012	7:38:41 AM	PH3 valve closed
4/20/2012	7:38:41 AM	SiCl4 pre valve closed
4/20/2012	7:38:41 AM	SiCl4 post valve closed
4/20/2012	7:38:41 AM	Main Vac valve closed
4/20/2012	7:38:41 AM	Bubbler valve closed
4/20/2012	7:38:41 AM	Bypass valve opened
4/20/2012	7:38:41 AM	Helium MFC set to  0.000000
4/20/2012	7:38:41 AM	H2 MFC set to  0.000000
4/20/2012	7:38:41 AM	BCl3 MFC set to  0.000000
4/20/2012	7:38:41 AM	PH3 MFC set to  0.000000
4/20/2012	7:38:41 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:38:41 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	7:38:41 AM	Tube furnace set to 0
4/20/2012	7:39:41 AM	Helium valve closed
4/20/2012	7:39:41 AM	H2 valve closed
4/20/2012	7:39:41 AM	BCl3 valve closed
4/20/2012	7:39:41 AM	PH3 valve closed
4/20/2012	7:39:41 AM	SiCl4 pre valve closed
4/20/2012	7:39:41 AM	SiCl4 post valve closed
4/20/2012	7:39:41 AM	Bypass valve closed
4/20/2012	7:39:41 AM	Bubbler valve closed
4/20/2012	7:39:41 AM	Main Vac valve opened
4/20/2012	7:39:41 AM	Helium MFC set to  0.000000
4/20/2012	7:39:41 AM	H2 MFC set to  0.000000
4/20/2012	7:39:41 AM	BCl3 MFC set to  0.000000
4/20/2012	7:39:41 AM	PH3 MFC set to  0.000000
4/20/2012	7:39:41 AM	SiCl4 MFC set to  0.000000
4/20/2012	7:39:41 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	7:39:41 AM	Tube furnace set to 0
4/20/2012	7:39:42 AM	Run finished at 7:39 AM
4/20/2012	7:39:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2012	10:23:24 AM	Main Vac valve closed
4/20/2012	10:23:53 AM	Main Vac valve opened
4/20/2012	10:23:53 AM	Main Vac valve closed
4/20/2012	10:23:54 AM	Main Vac valve opened
4/20/2012	10:24:08 AM	Recipe started at 10:24 AM
4/20/2012	10:24:08 AM	Helium valve closed
4/20/2012	10:24:08 AM	H2 valve closed
4/20/2012	10:24:08 AM	BCl3 valve closed
4/20/2012	10:24:08 AM	PH3 valve closed
4/20/2012	10:24:08 AM	SiCl4 pre valve closed
4/20/2012	10:24:08 AM	SiCl4 post valve closed
4/20/2012	10:24:08 AM	Bypass valve closed
4/20/2012	10:24:08 AM	Bubbler valve closed
4/20/2012	10:24:08 AM	Main Vac valve opened
4/20/2012	10:24:08 AM	Helium MFC set to  0.000000
4/20/2012	10:24:08 AM	H2 MFC set to  0.000000
4/20/2012	10:24:08 AM	BCl3 MFC set to  0.000000
4/20/2012	10:24:08 AM	PH3 MFC set to  0.000000
4/20/2012	10:24:08 AM	SiCl4 MFC set to  0.000000
4/20/2012	10:24:08 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	10:24:08 AM	Tube furnace set to 0
4/20/2012	10:24:11 AM	Helium valve closed
4/20/2012	10:24:11 AM	H2 valve closed
4/20/2012	10:24:11 AM	BCl3 valve closed
4/20/2012	10:24:11 AM	PH3 valve closed
4/20/2012	10:24:11 AM	SiCl4 pre valve closed
4/20/2012	10:24:11 AM	SiCl4 post valve closed
4/20/2012	10:24:11 AM	Main Vac valve closed
4/20/2012	10:24:11 AM	Bypass valve closed
4/20/2012	10:24:11 AM	Bubbler valve closed
4/20/2012	10:24:11 AM	Helium MFC set to  0.000000
4/20/2012	10:24:11 AM	H2 MFC set to  0.000000
4/20/2012	10:24:11 AM	BCl3 MFC set to  0.000000
4/20/2012	10:24:11 AM	PH3 MFC set to  0.000000
4/20/2012	10:24:11 AM	SiCl4 MFC set to  0.000000
4/20/2012	10:24:11 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	10:24:12 AM	Tube furnace set to 0
4/20/2012	10:24:15 AM	Helium valve closed
4/20/2012	10:24:15 AM	BCl3 valve closed
4/20/2012	10:24:15 AM	PH3 valve closed
4/20/2012	10:24:15 AM	SiCl4 pre valve closed
4/20/2012	10:24:15 AM	SiCl4 post valve closed
4/20/2012	10:24:15 AM	Main Vac valve closed
4/20/2012	10:24:15 AM	Bypass valve closed
4/20/2012	10:24:15 AM	Bubbler valve closed
4/20/2012	10:24:15 AM	H2 valve opened
4/20/2012	10:24:15 AM	Helium MFC set to  0.000000
4/20/2012	10:24:15 AM	H2 MFC set to  500.000000
4/20/2012	10:24:15 AM	BCl3 MFC set to  0.000000
4/20/2012	10:24:15 AM	PH3 MFC set to  0.000000
4/20/2012	10:24:15 AM	SiCl4 MFC set to  0.000000
4/20/2012	10:24:15 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	10:24:15 AM	Tube furnace set to 0
4/20/2012	10:25:23 AM	Helium valve closed
4/20/2012	10:25:23 AM	BCl3 valve closed
4/20/2012	10:25:23 AM	PH3 valve closed
4/20/2012	10:25:23 AM	SiCl4 pre valve closed
4/20/2012	10:25:23 AM	SiCl4 post valve closed
4/20/2012	10:25:23 AM	Main Vac valve closed
4/20/2012	10:25:23 AM	Bypass valve closed
4/20/2012	10:25:23 AM	H2 valve opened
4/20/2012	10:25:23 AM	Bubbler valve opened
4/20/2012	10:25:23 AM	Helium MFC set to  0.000000
4/20/2012	10:25:23 AM	H2 MFC set to  500.000000
4/20/2012	10:25:23 AM	BCl3 MFC set to  0.000000
4/20/2012	10:25:23 AM	PH3 MFC set to  0.000000
4/20/2012	10:25:23 AM	SiCl4 MFC set to  0.000000
4/20/2012	10:25:23 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	10:25:23 AM	Tube furnace set to 0
4/20/2012	10:25:24 AM	Helium valve closed
4/20/2012	10:25:24 AM	BCl3 valve closed
4/20/2012	10:25:24 AM	PH3 valve closed
4/20/2012	10:25:24 AM	SiCl4 pre valve closed
4/20/2012	10:25:24 AM	SiCl4 post valve closed
4/20/2012	10:25:24 AM	Main Vac valve closed
4/20/2012	10:25:24 AM	Bypass valve closed
4/20/2012	10:25:24 AM	H2 valve opened
4/20/2012	10:25:24 AM	Bubbler valve opened
4/20/2012	10:25:24 AM	Helium MFC set to  0.000000
4/20/2012	10:25:24 AM	H2 MFC set to  500.000000
4/20/2012	10:25:24 AM	BCl3 MFC set to  0.000000
4/20/2012	10:25:24 AM	PH3 MFC set to  0.000000
4/20/2012	10:25:24 AM	SiCl4 MFC set to  0.000000
4/20/2012	10:25:24 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	10:25:24 AM	Tube furnace set to 1000
4/20/2012	10:50:24 AM	Helium valve closed
4/20/2012	10:50:24 AM	PH3 valve closed
4/20/2012	10:50:24 AM	Main Vac valve closed
4/20/2012	10:50:24 AM	Bypass valve closed
4/20/2012	10:50:24 AM	H2 valve opened
4/20/2012	10:50:24 AM	BCl3 valve opened
4/20/2012	10:50:24 AM	SiCl4 pre valve opened
4/20/2012	10:50:24 AM	SiCl4 post valve opened
4/20/2012	10:50:24 AM	Bubbler valve opened
4/20/2012	10:50:24 AM	Helium MFC set to  0.000000
4/20/2012	10:50:24 AM	H2 MFC set to  450.000000
4/20/2012	10:50:24 AM	BCl3 MFC set to  1.000000
4/20/2012	10:50:24 AM	PH3 MFC set to  0.000000
4/20/2012	10:50:24 AM	SiCl4 MFC set to  50.000000
4/20/2012	10:50:24 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	10:50:24 AM	Tube furnace set to 1000
4/20/2012	11:10:24 AM	Helium valve closed
4/20/2012	11:10:24 AM	BCl3 valve closed
4/20/2012	11:10:24 AM	PH3 valve closed
4/20/2012	11:10:24 AM	SiCl4 pre valve closed
4/20/2012	11:10:24 AM	SiCl4 post valve closed
4/20/2012	11:10:24 AM	Main Vac valve closed
4/20/2012	11:10:24 AM	Bypass valve closed
4/20/2012	11:10:24 AM	H2 valve opened
4/20/2012	11:10:24 AM	Bubbler valve opened
4/20/2012	11:10:24 AM	Helium MFC set to  0.000000
4/20/2012	11:10:24 AM	H2 MFC set to  500.000000
4/20/2012	11:10:24 AM	BCl3 MFC set to  0.000000
4/20/2012	11:10:24 AM	PH3 MFC set to  0.000000
4/20/2012	11:10:24 AM	SiCl4 MFC set to  0.000000
4/20/2012	11:10:24 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	11:10:25 AM	Tube furnace set to 1000
4/20/2012	11:12:25 AM	Helium valve closed
4/20/2012	11:12:25 AM	BCl3 valve closed
4/20/2012	11:12:25 AM	Main Vac valve closed
4/20/2012	11:12:25 AM	Bypass valve closed
4/20/2012	11:12:25 AM	H2 valve opened
4/20/2012	11:12:25 AM	PH3 valve opened
4/20/2012	11:12:25 AM	SiCl4 pre valve opened
4/20/2012	11:12:25 AM	SiCl4 post valve opened
4/20/2012	11:12:25 AM	Bubbler valve opened
4/20/2012	11:12:25 AM	Helium MFC set to  0.000000
4/20/2012	11:12:25 AM	H2 MFC set to  430.000000
4/20/2012	11:12:25 AM	BCl3 MFC set to  0.000000
4/20/2012	11:12:25 AM	PH3 MFC set to  20.000000
4/20/2012	11:12:25 AM	SiCl4 MFC set to  50.000000
4/20/2012	11:12:25 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	11:12:25 AM	Tube furnace set to 1000
4/20/2012	11:13:25 AM	Helium valve closed
4/20/2012	11:13:25 AM	BCl3 valve closed
4/20/2012	11:13:25 AM	PH3 valve closed
4/20/2012	11:13:25 AM	SiCl4 pre valve closed
4/20/2012	11:13:25 AM	SiCl4 post valve closed
4/20/2012	11:13:25 AM	Main Vac valve closed
4/20/2012	11:13:25 AM	Bypass valve closed
4/20/2012	11:13:25 AM	H2 valve opened
4/20/2012	11:13:25 AM	Bubbler valve opened
4/20/2012	11:13:25 AM	Helium MFC set to  0.000000
4/20/2012	11:13:25 AM	H2 MFC set to  500.000000
4/20/2012	11:13:25 AM	BCl3 MFC set to  0.000000
4/20/2012	11:13:25 AM	PH3 MFC set to  0.000000
4/20/2012	11:13:25 AM	SiCl4 MFC set to  0.000000
4/20/2012	11:13:25 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	11:13:25 AM	Tube furnace set to 750
4/20/2012	11:28:25 AM	H2 valve closed
4/20/2012	11:28:25 AM	BCl3 valve closed
4/20/2012	11:28:25 AM	PH3 valve closed
4/20/2012	11:28:25 AM	SiCl4 pre valve closed
4/20/2012	11:28:25 AM	SiCl4 post valve closed
4/20/2012	11:28:25 AM	Main Vac valve closed
4/20/2012	11:28:25 AM	Bypass valve closed
4/20/2012	11:28:25 AM	Helium valve opened
4/20/2012	11:28:25 AM	Bubbler valve opened
4/20/2012	11:28:25 AM	Helium MFC set to  500.000000
4/20/2012	11:28:25 AM	H2 MFC set to  0.000000
4/20/2012	11:28:25 AM	BCl3 MFC set to  0.000000
4/20/2012	11:28:25 AM	PH3 MFC set to  0.000000
4/20/2012	11:28:25 AM	SiCl4 MFC set to  0.000000
4/20/2012	11:28:25 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	11:28:25 AM	Tube furnace set to 0
4/20/2012	11:48:25 AM	Helium valve closed
4/20/2012	11:48:25 AM	H2 valve closed
4/20/2012	11:48:25 AM	BCl3 valve closed
4/20/2012	11:48:25 AM	PH3 valve closed
4/20/2012	11:48:25 AM	SiCl4 pre valve closed
4/20/2012	11:48:25 AM	SiCl4 post valve closed
4/20/2012	11:48:25 AM	Main Vac valve closed
4/20/2012	11:48:25 AM	Bypass valve closed
4/20/2012	11:48:25 AM	Bubbler valve closed
4/20/2012	11:48:25 AM	Helium MFC set to  0.000000
4/20/2012	11:48:25 AM	H2 MFC set to  0.000000
4/20/2012	11:48:25 AM	BCl3 MFC set to  0.000000
4/20/2012	11:48:25 AM	PH3 MFC set to  0.000000
4/20/2012	11:48:25 AM	SiCl4 MFC set to  0.000000
4/20/2012	11:48:25 AM	Bypass solenoid MFC set to  0.000000
4/20/2012	11:48:25 AM	Tube furnace set to 0
4/20/2012	12:08:25 PM	Helium valve closed
4/20/2012	12:08:25 PM	H2 valve closed
4/20/2012	12:08:25 PM	BCl3 valve closed
4/20/2012	12:08:25 PM	PH3 valve closed
4/20/2012	12:08:25 PM	SiCl4 pre valve closed
4/20/2012	12:08:25 PM	SiCl4 post valve closed
4/20/2012	12:08:25 PM	Main Vac valve closed
4/20/2012	12:08:25 PM	Bubbler valve closed
4/20/2012	12:08:25 PM	Bypass valve opened
4/20/2012	12:08:25 PM	Helium MFC set to  0.000000
4/20/2012	12:08:25 PM	H2 MFC set to  0.000000
4/20/2012	12:08:25 PM	BCl3 MFC set to  0.000000
4/20/2012	12:08:25 PM	PH3 MFC set to  0.000000
4/20/2012	12:08:25 PM	SiCl4 MFC set to  0.000000
4/20/2012	12:08:25 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	12:08:26 PM	Tube furnace set to 0
4/20/2012	12:09:12 PM	Helium valve closed
4/20/2012	12:09:12 PM	H2 valve closed
4/20/2012	12:09:12 PM	BCl3 valve closed
4/20/2012	12:09:12 PM	PH3 valve closed
4/20/2012	12:09:12 PM	SiCl4 pre valve closed
4/20/2012	12:09:12 PM	SiCl4 post valve closed
4/20/2012	12:09:12 PM	Main Vac valve closed
4/20/2012	12:09:12 PM	Bubbler valve closed
4/20/2012	12:09:12 PM	Bypass valve opened
4/20/2012	12:09:12 PM	Helium MFC set to  0.000000
4/20/2012	12:09:12 PM	H2 MFC set to  0.000000
4/20/2012	12:09:12 PM	BCl3 MFC set to  0.000000
4/20/2012	12:09:12 PM	PH3 MFC set to  0.000000
4/20/2012	12:09:12 PM	SiCl4 MFC set to  0.000000
4/20/2012	12:09:12 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	12:09:13 PM	Tube furnace set to 0
4/20/2012	12:10:13 PM	Helium valve closed
4/20/2012	12:10:13 PM	H2 valve closed
4/20/2012	12:10:13 PM	BCl3 valve closed
4/20/2012	12:10:13 PM	PH3 valve closed
4/20/2012	12:10:13 PM	SiCl4 pre valve closed
4/20/2012	12:10:13 PM	SiCl4 post valve closed
4/20/2012	12:10:13 PM	Bypass valve closed
4/20/2012	12:10:13 PM	Bubbler valve closed
4/20/2012	12:10:13 PM	Main Vac valve opened
4/20/2012	12:10:13 PM	Helium MFC set to  0.000000
4/20/2012	12:10:13 PM	H2 MFC set to  0.000000
4/20/2012	12:10:13 PM	BCl3 MFC set to  0.000000
4/20/2012	12:10:13 PM	PH3 MFC set to  0.000000
4/20/2012	12:10:13 PM	SiCl4 MFC set to  0.000000
4/20/2012	12:10:13 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	12:10:13 PM	Tube furnace set to 0
4/20/2012	12:51:26 PM	Run aborted at 12:51 PM
4/20/2012	12:51:27 PM	Helium valve closed
4/20/2012	12:51:27 PM	H2 valve closed
4/20/2012	12:51:27 PM	BCl3 valve closed
4/20/2012	12:51:27 PM	PH3 valve closed
4/20/2012	12:51:27 PM	SiCl4 pre valve closed
4/20/2012	12:51:27 PM	SiCl4 post valve closed
4/20/2012	12:51:27 PM	Bypass valve closed
4/20/2012	12:51:27 PM	Main Vac valve closed
4/20/2012	12:51:27 PM	Bubbler valve closed
4/20/2012	12:51:27 PM	Helium MFC set to  0.000000
4/20/2012	12:51:27 PM	H2 MFC set to  0.000000
4/20/2012	12:51:27 PM	BCl3 MFC set to  0.000000
4/20/2012	12:51:27 PM	PH3 MFC set to  0.000000
4/20/2012	12:51:27 PM	SiCl4 MFC set to  0.000000
4/20/2012	12:51:27 PM	Tube furnace set to 0
4/20/2012	12:51:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2012	12:51:32 PM	Recipe started at 12:51 PM
4/20/2012	12:51:32 PM	Helium valve closed
4/20/2012	12:51:32 PM	H2 valve closed
4/20/2012	12:51:32 PM	BCl3 valve closed
4/20/2012	12:51:32 PM	PH3 valve closed
4/20/2012	12:51:32 PM	SiCl4 pre valve closed
4/20/2012	12:51:32 PM	SiCl4 post valve closed
4/20/2012	12:51:32 PM	Main Vac valve closed
4/20/2012	12:51:32 PM	Bypass valve closed
4/20/2012	12:51:32 PM	Bubbler valve closed
4/20/2012	12:51:32 PM	Helium MFC set to  0.000000
4/20/2012	12:51:32 PM	H2 MFC set to  0.000000
4/20/2012	12:51:32 PM	BCl3 MFC set to  0.000000
4/20/2012	12:51:32 PM	PH3 MFC set to  0.000000
4/20/2012	12:51:32 PM	SiCl4 MFC set to  0.000000
4/20/2012	12:51:32 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	12:51:32 PM	Tube furnace set to 0
4/20/2012	12:51:35 PM	H2 valve closed
4/20/2012	12:51:35 PM	BCl3 valve closed
4/20/2012	12:51:35 PM	PH3 valve closed
4/20/2012	12:51:35 PM	SiCl4 pre valve closed
4/20/2012	12:51:35 PM	SiCl4 post valve closed
4/20/2012	12:51:35 PM	Main Vac valve closed
4/20/2012	12:51:35 PM	Bypass valve closed
4/20/2012	12:51:35 PM	Bubbler valve closed
4/20/2012	12:51:35 PM	Helium valve opened
4/20/2012	12:51:35 PM	Helium MFC set to  500.000000
4/20/2012	12:51:35 PM	H2 MFC set to  0.000000
4/20/2012	12:51:35 PM	BCl3 MFC set to  0.000000
4/20/2012	12:51:35 PM	PH3 MFC set to  0.000000
4/20/2012	12:51:35 PM	SiCl4 MFC set to  0.000000
4/20/2012	12:51:35 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	12:51:35 PM	Tube furnace set to 0
4/20/2012	12:52:35 PM	Helium valve closed
4/20/2012	12:52:35 PM	H2 valve closed
4/20/2012	12:52:35 PM	BCl3 valve closed
4/20/2012	12:52:35 PM	PH3 valve closed
4/20/2012	12:52:35 PM	SiCl4 pre valve closed
4/20/2012	12:52:35 PM	SiCl4 post valve closed
4/20/2012	12:52:35 PM	Main Vac valve closed
4/20/2012	12:52:35 PM	Bypass valve closed
4/20/2012	12:52:35 PM	Bubbler valve closed
4/20/2012	12:52:35 PM	Helium MFC set to  0.000000
4/20/2012	12:52:35 PM	H2 MFC set to  0.000000
4/20/2012	12:52:35 PM	BCl3 MFC set to  0.000000
4/20/2012	12:52:35 PM	PH3 MFC set to  0.000000
4/20/2012	12:52:35 PM	SiCl4 MFC set to  0.000000
4/20/2012	12:52:35 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	12:52:35 PM	Tube furnace set to 0
4/20/2012	12:52:36 PM	Run finished at 12:52 PM
4/20/2012	12:52:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2012	1:01:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2012	1:01:31 PM	Recipe started at 1:01 PM
4/20/2012	1:01:31 PM	Helium valve closed
4/20/2012	1:01:31 PM	H2 valve closed
4/20/2012	1:01:31 PM	BCl3 valve closed
4/20/2012	1:01:31 PM	PH3 valve closed
4/20/2012	1:01:31 PM	SiCl4 pre valve closed
4/20/2012	1:01:31 PM	SiCl4 post valve closed
4/20/2012	1:01:31 PM	Main Vac valve closed
4/20/2012	1:01:31 PM	Bypass valve closed
4/20/2012	1:01:31 PM	Bubbler valve closed
4/20/2012	1:01:31 PM	Helium MFC set to  0.000000
4/20/2012	1:01:31 PM	H2 MFC set to  0.000000
4/20/2012	1:01:31 PM	BCl3 MFC set to  0.000000
4/20/2012	1:01:31 PM	PH3 MFC set to  0.000000
4/20/2012	1:01:31 PM	SiCl4 MFC set to  0.000000
4/20/2012	1:01:31 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	1:01:32 PM	Tube furnace set to 0
4/20/2012	1:01:35 PM	H2 valve closed
4/20/2012	1:01:35 PM	BCl3 valve closed
4/20/2012	1:01:35 PM	PH3 valve closed
4/20/2012	1:01:35 PM	SiCl4 pre valve closed
4/20/2012	1:01:35 PM	SiCl4 post valve closed
4/20/2012	1:01:35 PM	Main Vac valve closed
4/20/2012	1:01:35 PM	Bypass valve closed
4/20/2012	1:01:35 PM	Bubbler valve closed
4/20/2012	1:01:35 PM	Helium valve opened
4/20/2012	1:01:35 PM	Helium MFC set to  500.000000
4/20/2012	1:01:35 PM	H2 MFC set to  0.000000
4/20/2012	1:01:35 PM	BCl3 MFC set to  0.000000
4/20/2012	1:01:35 PM	PH3 MFC set to  0.000000
4/20/2012	1:01:35 PM	SiCl4 MFC set to  0.000000
4/20/2012	1:01:35 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	1:01:35 PM	Tube furnace set to 0
4/20/2012	1:01:35 PM	Helium valve closed
4/20/2012	1:01:35 PM	H2 valve closed
4/20/2012	1:01:35 PM	BCl3 valve closed
4/20/2012	1:01:35 PM	PH3 valve closed
4/20/2012	1:01:35 PM	SiCl4 pre valve closed
4/20/2012	1:01:35 PM	SiCl4 post valve closed
4/20/2012	1:01:35 PM	Main Vac valve closed
4/20/2012	1:01:35 PM	Bypass valve closed
4/20/2012	1:01:35 PM	Bubbler valve closed
4/20/2012	1:01:35 PM	Helium MFC set to  0.000000
4/20/2012	1:01:35 PM	H2 MFC set to  0.000000
4/20/2012	1:01:35 PM	BCl3 MFC set to  0.000000
4/20/2012	1:01:35 PM	PH3 MFC set to  0.000000
4/20/2012	1:01:35 PM	SiCl4 MFC set to  0.000000
4/20/2012	1:01:35 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	1:01:36 PM	Tube furnace set to 0
4/20/2012	1:01:37 PM	Run finished at 1:01 PM
4/20/2012	1:01:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2012	1:05:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2012	1:05:30 PM	Recipe started at 1:05 PM
4/20/2012	1:05:30 PM	Helium valve closed
4/20/2012	1:05:30 PM	H2 valve closed
4/20/2012	1:05:30 PM	BCl3 valve closed
4/20/2012	1:05:30 PM	PH3 valve closed
4/20/2012	1:05:30 PM	SiCl4 pre valve closed
4/20/2012	1:05:30 PM	SiCl4 post valve closed
4/20/2012	1:05:30 PM	Main Vac valve closed
4/20/2012	1:05:30 PM	Bubbler valve closed
4/20/2012	1:05:30 PM	Bypass valve opened
4/20/2012	1:05:30 PM	Helium MFC set to  0.000000
4/20/2012	1:05:30 PM	H2 MFC set to  0.000000
4/20/2012	1:05:30 PM	BCl3 MFC set to  0.000000
4/20/2012	1:05:30 PM	PH3 MFC set to  0.000000
4/20/2012	1:05:30 PM	SiCl4 MFC set to  0.000000
4/20/2012	1:05:30 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	1:05:30 PM	Tube furnace set to 0
4/20/2012	1:06:29 PM	Helium valve closed
4/20/2012	1:06:29 PM	H2 valve closed
4/20/2012	1:06:29 PM	BCl3 valve closed
4/20/2012	1:06:29 PM	PH3 valve closed
4/20/2012	1:06:29 PM	SiCl4 pre valve closed
4/20/2012	1:06:29 PM	SiCl4 post valve closed
4/20/2012	1:06:29 PM	Main Vac valve closed
4/20/2012	1:06:29 PM	Bubbler valve closed
4/20/2012	1:06:29 PM	Bypass valve opened
4/20/2012	1:06:29 PM	Helium MFC set to  0.000000
4/20/2012	1:06:29 PM	H2 MFC set to  0.000000
4/20/2012	1:06:29 PM	BCl3 MFC set to  0.000000
4/20/2012	1:06:29 PM	PH3 MFC set to  0.000000
4/20/2012	1:06:29 PM	SiCl4 MFC set to  0.000000
4/20/2012	1:06:29 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	1:06:29 PM	Tube furnace set to 0
4/20/2012	1:07:29 PM	Helium valve closed
4/20/2012	1:07:29 PM	H2 valve closed
4/20/2012	1:07:29 PM	BCl3 valve closed
4/20/2012	1:07:29 PM	PH3 valve closed
4/20/2012	1:07:29 PM	SiCl4 pre valve closed
4/20/2012	1:07:29 PM	SiCl4 post valve closed
4/20/2012	1:07:29 PM	Bypass valve closed
4/20/2012	1:07:29 PM	Bubbler valve closed
4/20/2012	1:07:29 PM	Main Vac valve opened
4/20/2012	1:07:29 PM	Helium MFC set to  0.000000
4/20/2012	1:07:29 PM	H2 MFC set to  0.000000
4/20/2012	1:07:29 PM	BCl3 MFC set to  0.000000
4/20/2012	1:07:29 PM	PH3 MFC set to  0.000000
4/20/2012	1:07:29 PM	SiCl4 MFC set to  0.000000
4/20/2012	1:07:29 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	1:07:30 PM	Tube furnace set to 0
4/20/2012	1:07:31 PM	Run finished at 1:07 PM
4/20/2012	1:07:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2012	1:16:06 PM	Recipe started at 1:16 PM
4/20/2012	1:16:06 PM	Helium valve closed
4/20/2012	1:16:06 PM	H2 valve closed
4/20/2012	1:16:06 PM	BCl3 valve closed
4/20/2012	1:16:06 PM	PH3 valve closed
4/20/2012	1:16:06 PM	SiCl4 pre valve closed
4/20/2012	1:16:06 PM	SiCl4 post valve closed
4/20/2012	1:16:06 PM	Bypass valve closed
4/20/2012	1:16:06 PM	Bubbler valve closed
4/20/2012	1:16:06 PM	Main Vac valve opened
4/20/2012	1:16:06 PM	Helium MFC set to  0.000000
4/20/2012	1:16:06 PM	H2 MFC set to  0.000000
4/20/2012	1:16:06 PM	BCl3 MFC set to  0.000000
4/20/2012	1:16:06 PM	PH3 MFC set to  0.000000
4/20/2012	1:16:06 PM	SiCl4 MFC set to  0.000000
4/20/2012	1:16:06 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	1:16:06 PM	Tube furnace set to 0
4/20/2012	3:16:06 PM	Helium valve closed
4/20/2012	3:16:06 PM	H2 valve closed
4/20/2012	3:16:06 PM	BCl3 valve closed
4/20/2012	3:16:06 PM	PH3 valve closed
4/20/2012	3:16:06 PM	SiCl4 pre valve closed
4/20/2012	3:16:06 PM	SiCl4 post valve closed
4/20/2012	3:16:06 PM	Main Vac valve closed
4/20/2012	3:16:06 PM	Bypass valve closed
4/20/2012	3:16:06 PM	Bubbler valve closed
4/20/2012	3:16:06 PM	Helium MFC set to  0.000000
4/20/2012	3:16:06 PM	H2 MFC set to  0.000000
4/20/2012	3:16:06 PM	BCl3 MFC set to  0.000000
4/20/2012	3:16:06 PM	PH3 MFC set to  0.000000
4/20/2012	3:16:06 PM	SiCl4 MFC set to  0.000000
4/20/2012	3:16:06 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	3:16:06 PM	Tube furnace set to 0
4/20/2012	3:16:09 PM	Helium valve closed
4/20/2012	3:16:09 PM	BCl3 valve closed
4/20/2012	3:16:09 PM	PH3 valve closed
4/20/2012	3:16:09 PM	SiCl4 pre valve closed
4/20/2012	3:16:09 PM	SiCl4 post valve closed
4/20/2012	3:16:09 PM	Main Vac valve closed
4/20/2012	3:16:09 PM	Bypass valve closed
4/20/2012	3:16:09 PM	Bubbler valve closed
4/20/2012	3:16:09 PM	H2 valve opened
4/20/2012	3:16:09 PM	Helium MFC set to  0.000000
4/20/2012	3:16:09 PM	H2 MFC set to  500.000000
4/20/2012	3:16:09 PM	BCl3 MFC set to  0.000000
4/20/2012	3:16:09 PM	PH3 MFC set to  0.000000
4/20/2012	3:16:09 PM	SiCl4 MFC set to  0.000000
4/20/2012	3:16:09 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	3:16:09 PM	Tube furnace set to 0
4/20/2012	3:17:16 PM	Helium valve closed
4/20/2012	3:17:16 PM	BCl3 valve closed
4/20/2012	3:17:16 PM	PH3 valve closed
4/20/2012	3:17:16 PM	SiCl4 pre valve closed
4/20/2012	3:17:16 PM	SiCl4 post valve closed
4/20/2012	3:17:16 PM	Main Vac valve closed
4/20/2012	3:17:16 PM	Bypass valve closed
4/20/2012	3:17:16 PM	H2 valve opened
4/20/2012	3:17:16 PM	Bubbler valve opened
4/20/2012	3:17:16 PM	Helium MFC set to  0.000000
4/20/2012	3:17:16 PM	H2 MFC set to  500.000000
4/20/2012	3:17:16 PM	BCl3 MFC set to  0.000000
4/20/2012	3:17:16 PM	PH3 MFC set to  0.000000
4/20/2012	3:17:16 PM	SiCl4 MFC set to  0.000000
4/20/2012	3:17:16 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	3:17:16 PM	Tube furnace set to 0
4/20/2012	3:17:17 PM	Helium valve closed
4/20/2012	3:17:17 PM	BCl3 valve closed
4/20/2012	3:17:17 PM	PH3 valve closed
4/20/2012	3:17:17 PM	SiCl4 pre valve closed
4/20/2012	3:17:17 PM	SiCl4 post valve closed
4/20/2012	3:17:17 PM	Main Vac valve closed
4/20/2012	3:17:17 PM	Bypass valve closed
4/20/2012	3:17:17 PM	H2 valve opened
4/20/2012	3:17:17 PM	Bubbler valve opened
4/20/2012	3:17:17 PM	Helium MFC set to  0.000000
4/20/2012	3:17:17 PM	H2 MFC set to  500.000000
4/20/2012	3:17:17 PM	BCl3 MFC set to  0.000000
4/20/2012	3:17:17 PM	PH3 MFC set to  0.000000
4/20/2012	3:17:17 PM	SiCl4 MFC set to  0.000000
4/20/2012	3:17:17 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	3:17:17 PM	Tube furnace set to 1000
4/20/2012	3:42:17 PM	Helium valve closed
4/20/2012	3:42:17 PM	PH3 valve closed
4/20/2012	3:42:17 PM	Main Vac valve closed
4/20/2012	3:42:17 PM	Bypass valve closed
4/20/2012	3:42:17 PM	H2 valve opened
4/20/2012	3:42:17 PM	BCl3 valve opened
4/20/2012	3:42:17 PM	SiCl4 pre valve opened
4/20/2012	3:42:17 PM	SiCl4 post valve opened
4/20/2012	3:42:17 PM	Bubbler valve opened
4/20/2012	3:42:17 PM	Helium MFC set to  0.000000
4/20/2012	3:42:17 PM	H2 MFC set to  450.000000
4/20/2012	3:42:17 PM	BCl3 MFC set to  1.000000
4/20/2012	3:42:17 PM	PH3 MFC set to  0.000000
4/20/2012	3:42:17 PM	SiCl4 MFC set to  50.000000
4/20/2012	3:42:17 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	3:42:18 PM	Tube furnace set to 1000
4/20/2012	4:04:18 PM	Helium valve closed
4/20/2012	4:04:18 PM	BCl3 valve closed
4/20/2012	4:04:18 PM	PH3 valve closed
4/20/2012	4:04:18 PM	SiCl4 pre valve closed
4/20/2012	4:04:18 PM	SiCl4 post valve closed
4/20/2012	4:04:18 PM	Main Vac valve closed
4/20/2012	4:04:18 PM	Bypass valve closed
4/20/2012	4:04:18 PM	H2 valve opened
4/20/2012	4:04:18 PM	Bubbler valve opened
4/20/2012	4:04:18 PM	Helium MFC set to  0.000000
4/20/2012	4:04:18 PM	H2 MFC set to  500.000000
4/20/2012	4:04:18 PM	BCl3 MFC set to  0.000000
4/20/2012	4:04:18 PM	PH3 MFC set to  0.000000
4/20/2012	4:04:18 PM	SiCl4 MFC set to  0.000000
4/20/2012	4:04:18 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	4:04:18 PM	Tube furnace set to 1000
4/20/2012	4:06:18 PM	Helium valve closed
4/20/2012	4:06:18 PM	BCl3 valve closed
4/20/2012	4:06:18 PM	Main Vac valve closed
4/20/2012	4:06:18 PM	Bypass valve closed
4/20/2012	4:06:18 PM	H2 valve opened
4/20/2012	4:06:18 PM	PH3 valve opened
4/20/2012	4:06:18 PM	SiCl4 pre valve opened
4/20/2012	4:06:18 PM	SiCl4 post valve opened
4/20/2012	4:06:18 PM	Bubbler valve opened
4/20/2012	4:06:18 PM	Helium MFC set to  0.000000
4/20/2012	4:06:18 PM	H2 MFC set to  445.000000
4/20/2012	4:06:18 PM	BCl3 MFC set to  0.000000
4/20/2012	4:06:18 PM	PH3 MFC set to  5.000000
4/20/2012	4:06:18 PM	SiCl4 MFC set to  50.000000
4/20/2012	4:06:18 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	4:06:18 PM	Tube furnace set to 1000
4/20/2012	4:07:18 PM	Helium valve closed
4/20/2012	4:07:18 PM	BCl3 valve closed
4/20/2012	4:07:18 PM	PH3 valve closed
4/20/2012	4:07:18 PM	SiCl4 pre valve closed
4/20/2012	4:07:18 PM	SiCl4 post valve closed
4/20/2012	4:07:18 PM	Main Vac valve closed
4/20/2012	4:07:18 PM	Bypass valve closed
4/20/2012	4:07:18 PM	H2 valve opened
4/20/2012	4:07:18 PM	Bubbler valve opened
4/20/2012	4:07:18 PM	Helium MFC set to  0.000000
4/20/2012	4:07:18 PM	H2 MFC set to  500.000000
4/20/2012	4:07:18 PM	BCl3 MFC set to  0.000000
4/20/2012	4:07:18 PM	PH3 MFC set to  0.000000
4/20/2012	4:07:18 PM	SiCl4 MFC set to  0.000000
4/20/2012	4:07:18 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	4:07:18 PM	Tube furnace set to 750
4/20/2012	4:22:18 PM	H2 valve closed
4/20/2012	4:22:18 PM	BCl3 valve closed
4/20/2012	4:22:18 PM	PH3 valve closed
4/20/2012	4:22:18 PM	SiCl4 pre valve closed
4/20/2012	4:22:18 PM	SiCl4 post valve closed
4/20/2012	4:22:18 PM	Main Vac valve closed
4/20/2012	4:22:18 PM	Bypass valve closed
4/20/2012	4:22:18 PM	Helium valve opened
4/20/2012	4:22:18 PM	Bubbler valve opened
4/20/2012	4:22:18 PM	Helium MFC set to  500.000000
4/20/2012	4:22:18 PM	H2 MFC set to  0.000000
4/20/2012	4:22:18 PM	BCl3 MFC set to  0.000000
4/20/2012	4:22:18 PM	PH3 MFC set to  0.000000
4/20/2012	4:22:18 PM	SiCl4 MFC set to  0.000000
4/20/2012	4:22:18 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	4:22:19 PM	Tube furnace set to 0
4/20/2012	4:42:19 PM	Helium valve closed
4/20/2012	4:42:19 PM	H2 valve closed
4/20/2012	4:42:19 PM	BCl3 valve closed
4/20/2012	4:42:19 PM	PH3 valve closed
4/20/2012	4:42:19 PM	SiCl4 pre valve closed
4/20/2012	4:42:19 PM	SiCl4 post valve closed
4/20/2012	4:42:19 PM	Main Vac valve closed
4/20/2012	4:42:19 PM	Bypass valve closed
4/20/2012	4:42:19 PM	Bubbler valve closed
4/20/2012	4:42:19 PM	Helium MFC set to  0.000000
4/20/2012	4:42:19 PM	H2 MFC set to  0.000000
4/20/2012	4:42:19 PM	BCl3 MFC set to  0.000000
4/20/2012	4:42:19 PM	PH3 MFC set to  0.000000
4/20/2012	4:42:19 PM	SiCl4 MFC set to  0.000000
4/20/2012	4:42:19 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	4:42:19 PM	Tube furnace set to 0
4/20/2012	5:02:19 PM	Helium valve closed
4/20/2012	5:02:19 PM	H2 valve closed
4/20/2012	5:02:19 PM	BCl3 valve closed
4/20/2012	5:02:19 PM	PH3 valve closed
4/20/2012	5:02:19 PM	SiCl4 pre valve closed
4/20/2012	5:02:19 PM	SiCl4 post valve closed
4/20/2012	5:02:19 PM	Main Vac valve closed
4/20/2012	5:02:19 PM	Bubbler valve closed
4/20/2012	5:02:19 PM	Bypass valve opened
4/20/2012	5:02:19 PM	Helium MFC set to  0.000000
4/20/2012	5:02:19 PM	H2 MFC set to  0.000000
4/20/2012	5:02:19 PM	BCl3 MFC set to  0.000000
4/20/2012	5:02:19 PM	PH3 MFC set to  0.000000
4/20/2012	5:02:19 PM	SiCl4 MFC set to  0.000000
4/20/2012	5:02:19 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	5:02:19 PM	Tube furnace set to 0
4/20/2012	5:03:05 PM	Helium valve closed
4/20/2012	5:03:05 PM	H2 valve closed
4/20/2012	5:03:05 PM	BCl3 valve closed
4/20/2012	5:03:05 PM	PH3 valve closed
4/20/2012	5:03:05 PM	SiCl4 pre valve closed
4/20/2012	5:03:05 PM	SiCl4 post valve closed
4/20/2012	5:03:05 PM	Main Vac valve closed
4/20/2012	5:03:05 PM	Bubbler valve closed
4/20/2012	5:03:05 PM	Bypass valve opened
4/20/2012	5:03:05 PM	Helium MFC set to  0.000000
4/20/2012	5:03:05 PM	H2 MFC set to  0.000000
4/20/2012	5:03:05 PM	BCl3 MFC set to  0.000000
4/20/2012	5:03:05 PM	PH3 MFC set to  0.000000
4/20/2012	5:03:05 PM	SiCl4 MFC set to  0.000000
4/20/2012	5:03:05 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	5:03:05 PM	Tube furnace set to 0
4/20/2012	5:04:05 PM	Helium valve closed
4/20/2012	5:04:05 PM	H2 valve closed
4/20/2012	5:04:05 PM	BCl3 valve closed
4/20/2012	5:04:05 PM	PH3 valve closed
4/20/2012	5:04:05 PM	SiCl4 pre valve closed
4/20/2012	5:04:05 PM	SiCl4 post valve closed
4/20/2012	5:04:05 PM	Bypass valve closed
4/20/2012	5:04:05 PM	Bubbler valve closed
4/20/2012	5:04:05 PM	Main Vac valve opened
4/20/2012	5:04:05 PM	Helium MFC set to  0.000000
4/20/2012	5:04:05 PM	H2 MFC set to  0.000000
4/20/2012	5:04:05 PM	BCl3 MFC set to  0.000000
4/20/2012	5:04:05 PM	PH3 MFC set to  0.000000
4/20/2012	5:04:05 PM	SiCl4 MFC set to  0.000000
4/20/2012	5:04:05 PM	Bypass solenoid MFC set to  0.000000
4/20/2012	5:04:05 PM	Tube furnace set to 0
4/20/2012	6:04:05 PM	Run finished at 6:04 PM
